beam lithography meaning in English
射束刻蚀法
Examples
- Vector scan electron beam lithography
矢量扫描电子束光刻 - Ion beam lithography
离子束微影术 - This paper introduced the develop level of electron beam lithography in the world and the techniques used in pattern generators
论文首先简要介绍了国内外电子束曝光技术的发展水平和图形发生器的工作原理。 - The most prevalent procedure is to use photolithography or electron - beam lithography to produce a pattern in a layer of photoresist on the surface of a silicon wafer
最常用的步骤是用光蚀刻或电子束蚀刻法，在矽晶圆表面的光阻层上制作出图案。 - In this article we briefly introduce the e - beam lithography techniques , and we describe our experiences in the modification of an sem into an e - beam writer
以电子显微镜改装成的简易电子束曝光机在性能上虽比不上设计精良的专业化电子束曝光机，但在很多情况下可以符合研发工作的要求，可说是经济实用的方案。